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Модульные СЗМ
Автоматизированные СЗМ
Специализированные СЗМ
 

Терминология СЗМ

C-AFM

Contact AFM
In contact AFM modes of operation scanning probe tip touches with the investigated sample surface. During scanning the probe or sample can be vibrated with frequencies below resonance, in resonance (including overtones) and above resonance. Contact AFM includes several d.c.and a.c. modes: constant-height mode, constant-force mode, force modulation mode, scanning microdeformation microscopy, resonance contact scanning force microscopy, ultrasonic force microscopy (sample-induced and waveguide), heterodyne force microscopy, and so on.

Conducting AFM
Contact mode of AFM operation with conductive tip. The tip-surface current is measured during scanning.

C AFM/STM
Combined AFM/STM
Appl Phys A 66 7, S49 (1998).
CAM

Constant-amplitude mode of non-contact AFM.
In constant-amplitude mode the tip is oscillating with a constant amplitude A of typically 1–10 nm at the eigenfrequency f of the cantilever, which may shift by Df due to forces between tip and sample. The oscillation amplitude is kept constant by a regulation circuit that excites a piezoactuator with a sinusoidal voltage of the oscillation frequency f and an amplitude Vexc . The actuator shakes the fixed end of the cantilever. When the cantilever oscillation is damped due to the tip-sample interaction, Vexc will increase to maintain the oscillation amplitude constant. By recording Df and Vexc simultaneously, forces and dissipation can be measured.
Phys. Rev. B 62, 13674 (2000); Phys. Rev. B 61, 11151 (2000).

cantilever
part of SFM probe.
Cantilever vibration mode

An atomic force microscope (AFM) combined with ultrasonic frequency vibration of a cantilever excited at its support. This method enables both topography and elasticity imaging of stiff samples such as metals and ceramics, without a need for bonding a transducer to the sample.
Jpn. J. Appl. Phys. 35(1996) 3787.

CASM
calorimetric analysis with scanning microscopy
Rev. Sci. Instrum. 67, 4268 (1996).
CCCM SCM
Constant change capacitance mode
J. Vac. Sci. Techn. B 16, 344 (1998).
CCM

Calibration Curve Method or Conversion Curve Method
The calibration or conversion curve method (CCM) refers to using a database of calculations of the capacitance done for a matrix set of model parameters, such as oxide thickness, uniform dopant density, etc., as one method for interpreting Scanning Capacitance Microscope (SCM) measurements. The method was originally intended to help analyze SCM data for slowly varying dopant profiles, where the condition of quasi charge neutrality could be suitably maintained during SCM measurement.
J. Vac. Sci. Techn. B 18, 414 (2000).

CD

Critical Dimension
The size of the feature printed in the resist.

CDI-mode
Constant amplitude Dynamic Indentation Mode
A modified DM-mode with usage an additional feedback loop which keeps constant the amplitude of dynamic indentation.
Composites A 29A (1998), 1251.
CDR-Tip
Critical dimension re-entrant probe tip
CEM
Constant-excitation mode
Applied Physics A 66, № 7, S295 (1998).
CFM
Cemical Force Microscopy
J. Vac. Sci. Techn. B 18, 414 (2000).
Contact Force Microscopy, see Contact AFM
CILO
Current Induced Local Oxidation
http://www.research.ibm.com/nanoscience/cilo.html
CITS
Current imaging tunneling spectroscopy
J. Appl. Phys. 79, 2115 (1996).
CL
Cantilever
CMP
chemical mechanical planarization
химико-механическая планаризация, ХМП
CNT
Carbon Nanotube
CODYMode

Combined Dynamic x Mode
In CODYMode SFM at least two oscillations with sufficiently different frequencies and amplitudes are superimposed and interact with the sample surface. This enables the concurrent measurement of the topography, adhesive and frictional forces beside further mechanical surface properties of the sample.
Rev. Sci. Instrum. 72, 150 (2001).

Constant-current mode for STM

In constant-current mode the feedback keeps the tip-surface current constant, and one deteckts the variations of the local height of the tip accordingly to the sample surface. In this mode one can measure irregular surfaces with high precision.

Constant-force mode for AFM
In constant-force mode the feedback keeps the force betveen the cantilever and sample surface (cantilever bending) constant.
Constant-height mode for SPM

Constant-height mode is faster than constant-current or constant-force modes since the feedback mechanism is turned off (or is used with very low gain parameters).

Contact mode
See contact AFM
COO
cost of ownership
the total lifetime cost associated with acquisition, installation, and operation of fabrication equipment
COP
Crystal-Originated Pit
CP-AFM
Conducting probe AFM
J. Vac. Sci. Techn. B 18, 632 (2000).
CPD
Contact potential difference
c-Si
Cristalline Si
CSLM
Confocal Scanning Laser Microscopy
CSPM

Conductive SPM, see also Spreading Resistance Profiling (SRP), Spreading Resistance Microscopy (SRM) Simultaneous topography and current images obtaining in the contact mode by conductive AFM, with bias applied between the probe and the sample; hence the current reflects the nanostructural local conductivity of the sample.
Jap. J. Appl. Phys. 39, 3728 (2000).

CVT
Constant-vibration mode
Applied Physics A 66, № 7, S295 (1998).
 
 
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