|TITANIUM||АСМ Раман||Модульные СЗМ||Автоматизированные СЗМ||Специализированные СЗМ|
The variation of linewidth as a function of both focus and exposure energy. The data is typically plotted as linewidth versus focus for different exposure energies.
All processes from wafer start through final contact window processing.
Phys. Rev. Lett. 59, 1942 (1987).
Nanotechnology 2, (1991) 103. Nanotechnology 8, (1997) 163.
J. Appl. Phys. 69, 668 (1991).
Force modulation technique.
In this operating mode the tip oscillates with its new eigenfrequency f' and moves in and out of the interaction region during each oscillation cycle. The new eigenfrequency is different by Df from the original eigenfrequency f due to the tip-surface interaction. An AFM image can be obtained by fixing Df to a certain constant.
Phys. Rev B 59, 13267 (1999)
Fourier Transform Infrared Spectroscopy
A simple force curve records the force felt by the tip as it approaches and retracts from a point on the sample surface. A force volume contains an array of force curves over the entire sample area and is generated by ramping the z-piezo as the tip scans across the area as shown in the figure above. Each force curve is measured at a unique x-y position in the area, and force curves from an array of x-y points are combined into a three-dimensional array, or "volume," of force data. The value at a point (x,y,z) in the volume is the deflection (force) of the cantilever at that position in space. Volumes can be produced from any available imaging mode such as Tapping Mode or Phase Imaging.