СЗМ Раман Нано ИК системы
Модульные СЗМ
Автоматизированные СЗМ
Специализированные СЗМ
 

Терминология СЗМ

LAX
Los Angeles International Airport
LDOS
local density of states
LEIS
LEIS
Localized Electrochemical Impedance Spectroscopy
http://www.uniscan.co.uk/leis270frame.html
LER
Line Edge Roughness (LER)
The deviation of a feature edge (as viewed top down) from a smooth, ideal shape. That is, the edge deviations of a feature that occur on a dimensional scale much smaller than the resolution limit of the imaging tool that was used to print the feature.
LER - Local line-edge variation (3 sigma total, all frequency component  included, both edges) evaluated along a distance that allows determination of spatial wavelength equal to times the technology node. (ITRS Roadmap 2004)
LES
Light Emission Spectroscopy
Rev. Sci. Instr. 72, 2097 (2000).
LFM
Lateral Force Microscopy
Phys. Rev. Lett, 59, 1942 (1987).
lift-mode

In lift-mode operation the scanning is divided into two parts and with a first scan to obtain and store topographical information and with a second scan to measure the parameter of the surface other than topography or to perform t he task while the probe height is controlled using the stored topographic information.
US Pat. 5308974

LLC
limited liability company
компания с ограниченной ответственностью
LMM
Lateral Modulation Mode
Nanotechnology 2, (1991) 103.
LS SPM
Large Sample SPM
LT SPM
Low Temperature SPM
LWR

Line Width Roughness.
LWR is defined as LWR=sqrt(2)LER for uncorrelated line edge roughness.

LWU
line width uniformity
LZT
Landing Zone Textured (Hard Disk)
Laser Zone Texturing
 
 
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