|TITANIUM||АСМ Раман||Модульные СЗМ||Автоматизированные СЗМ||Специализированные СЗМ|
Localized Electrochemical Impedance Spectroscopy
The deviation of a feature edge (as viewed top down) from a smooth, ideal shape. That is, the edge deviations of a feature that occur on a dimensional scale much smaller than the resolution limit of the imaging tool that was used to print the feature.
LER - Local line-edge variation (3 sigma total, all frequency component included, both edges) evaluated along a distance that allows determination of spatial wavelength equal to times the technology node. (ITRS Roadmap 2004)
Rev. Sci. Instr. 72, 2097 (2000).
Phys. Rev. Lett, 59, 1942 (1987).
In lift-mode operation the scanning is divided into two parts and with a first scan to obtain and store topographical information and with a second scan to measure the parameter of the surface other than topography or to perform t he task while the probe height is controlled using the stored topographic information.
US Pat. 5308974
компания с ограниченной ответственностью
Nanotechnology 2, (1991) 103.
Line Width Roughness.
LWR is defined as LWR=sqrt(2)LER for uncorrelated line edge roughness.
Laser Zone Texturing