|СЗМ Раман Нано ИК системы||Модульные СЗМ||Автоматизированные СЗМ||Специализированные СЗМ|
VS method is developed for measuring inner dimensions of smallholes. In VS method (with a single probe system,) the electrical contact between avibrating probe and the inner surface of a hole is detected and the duty factor of the contact ismeasured. Through controlled scanning by a probe with a constant duty factor, data on theups and downs of the surface profile are obtained. To characterize inside profiles ofmicro-holes regardless of materials, a twin-probe VS method (with electrical contact between a between probes) is developed.
Meas. Sci. Technol. 10, 697 (1999) .
Appl. Phys. A 66, № 7, S181 (1998).