СЗМ Раман Нано ИК системы
Модульные СЗМ
Автоматизированные СЗМ
Специализированные СЗМ
 

Терминология СЗМ

VIM
International Vocabulary of Basic and General Terms in
Metrology
VS method

Vibroscanning method
VS method is developed for measuring inner dimensions of smallholes. In VS method (with a single probe system,) the electrical contact between avibrating probe and the inner surface of a hole is detected and the duty factor of the contact ismeasured. Through controlled scanning by a probe with a constant duty factor, data on theups and downs of the surface profile are obtained. To characterize inside profiles ofmicro-holes regardless of materials, a twin-probe VS method (with electrical contact between a between probes) is developed.
Meas. Sci. Technol. 10, 697 (1999) .

VTS
Voltage Tunnel Spectroscopy
Appl. Phys. A 66, № 7, S181 (1998).
VT SPM
Variable Temperature SPM
 
 
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