Ballistic Electron Emission Microscopy
BEEM employs STM for investigation subsurface interface in Shottky-barrier systems, semicondfuctor heterojunctions, and other interfaces. Electron tunneling from the tip to the base electrode injects ballistic electrons into the base. The spectrum of base-collector current provides a direct probe of interface electronic structure.
Phys. Rev. B 60, 1406 (1988).
Ballistic Electron Emission Spectroscopy
back end of line
Process steps from contact through completion of the wafer prior to electrical test. Also called back end.
bill of materials
In this mode of operation the error signal E representing bending of the cantilever not corrected by the feedback is scaled and added to the Z signal to provide a mathematically correct image (I=E+Z).
QUESANT Technical Note No. T-2 (Oct. 1998)