Los Angeles International Airport
local density of states
Localized Electrochemical Impedance Spectroscopy
Line Edge Roughness (LER)
The deviation of a feature edge (as viewed top down) from a smooth, ideal shape. That is, the edge deviations of a feature that occur on a dimensional scale much smaller than the resolution limit of the imaging tool that was used to print the feature.
LER - Local line-edge variation (3 sigma total, all frequency component included, both edges) evaluated along a distance that allows determination of spatial wavelength equal to times the technology node. (ITRS Roadmap 2004)
Light Emission Spectroscopy
Rev. Sci. Instr. 72, 2097 (2000).
Lateral Force Microscopy
Phys. Rev. Lett, 59, 1942 (1987).
In lift-mode operation the scanning is divided into two parts and with a first scan to obtain and store topographical information and with a second scan to measure the parameter of the surface other than topography or to perform t he task while the probe height is controlled using the stored topographic information.
US Pat. 5308974
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Lateral Modulation Mode
Nanotechnology 2, (1991) 103.
Large Sample SPM
Low Temperature SPM
Line Width Roughness.
LWR is defined as LWR=sqrt(2)LER for uncorrelated line edge roughness.
line width uniformity
Landing Zone Textured (Hard Disk)
Laser Zone Texturing